NEXCERA™｜Cordierite-based ceramics with high specific stiffness and excellent thermal stability

K-GenesisX™

NEXCERA™

Features
Advantages
CO₂ Emission Reduction Data
Interview

NEXCERA™

NEXCERA™ Features

NEXCERA™ is a ceramic based on cordierite developed in the fine ceramics business that Krosaki Harima is expanding through utilization of know-how cultivated in refractory manufacturing. By taking advantage of NEXCERA™’s near-zero expansion characteristics around room temperature, it is possible to achieve lightweight and high stiffness and this has contributed to improving the performance of semiconductor manufacturing equipment. Also, by applying diffusion bonding technology that bond materials together and utilizing the characteristics of a poreless material, it is possible to provide mirror units with complexly designed components suited to customers’ sophisticated requirements.

This material has higher specific stiffness than low thermal expansion glass (LTEG) and superior thermal stability, so it is expected to realise application in high-precision mirrors used in optical telescopes for space development.

Specific stiffness and thermal stability

Comparison of physical properties between LTEG and NEXCERA™

Property [HT1]	Linear expansion coefficient α [×10^-6/K]	Specific gravity ρ [g/cm³]	Stiffness E [GPa]	Specific stiffness [E/ρ]	Thermal stability k/α［W/µｍ］
NEXCERA™	0.03	2.57	143	56	235
LTEG	0.02	2.53	90	36	73

* NEXCERA™ has higher specific stiffness than low thermal expansion glass (LTEG) as well as superior thermal stability (the property of resisting expansion and quickly achieving uniform heat).

Presentation Materials and inquiries for NEXCERA™

Advantages of NEXCERA™

1 An extremely low thermal expansion coefficient suppresses thermal deformation

In the semiconductor industry that supports the development of electronics, cutting-edge technology is required in the parts of semiconductor manufacturing equipment to achieve extremely high positioning accuracy at the nano level. NEXCERA™ has an extremely low thermal expansion coefficient and can suppress thermal deformation, so it has been widely adopted in practical use in the parts of semiconductor manufacturing equipment.

2 Enables lightweight designs due to high stiffness

Stiffness is about 1.5 times higher than conventional low thermal expansion glass (LTEG), enabling weight reduction through rib structure.
NEXCERA™ is also expected to be used in mirrors for optical telescopes in satellites, an application exploiting its lightweight, high stiffness characteristics.

*Large mirror (⌀724 spherical mirror (R1200)) prototyped through a contract with JAXA

3 Conserving energy through weight reduction

The wafer stage and reticle stage of semiconductor exposure equipment move at high speed, so energy can be saved by using NEXCERA™ to reduce weight.
In space industry applications, using NEXCERA™ to reduce the weight of optical telescope mirrors can decrease rocket payload weight, and help reduce CO2 emissions by saving rocket fuel.

Presentation Materials and inquiries for NEXCERA™

Contribution to SDGs with NEXCERA™

“9: Industry, innovation and infrastructure” Providing ceramics to various fields

We are contributing not only to electronics fields such as the semiconductor manufacturing equipment that is now indispensable to our lives, but also to the space field where future development is expected.
We will continue to refine our ceramic product development and technical capabilities, creating a foundation for technological innovation in a wide range of industrial fields, and thereby contributing to society.

NEXCERA™ Interview
（Team member Interviews）

NEXCERA™

Applications ranging from semiconductors to outer space by capitalizing on a low coefficient of thermal expansion and light weight. Exploring the limitless possibilities of ceramics.

In anticipation of the increasing demand for higher precision alongside the evolution of semiconductors, we began developing a material capable of achieving near-zero thermal expansion at room temperature ahead of our competitors around the year 2000. The result of that effort was the development of NEXCERA™.

Presentation Materials and inquiries for NEXCERA™

Strategic Products

Steel

TOUGHMAX™ $Background$

Features

Compared to conventional magnesia-carbon bricks, these refractory bricks are less prone to internal crack growth and less susceptible to breakage.

Durability is high, so...

Equipment service life is longer, reducing customers’ refractory consumption
Carbon dioxide emissions from blast furnaces are reduced by increasing scrap (reducing hot-metal)

Steel
Non-
ferrous
Incine
ration

Dry-Free™ $Background$

Features

This is a groundbreaking monolithic refractory that eliminates the need for a drying process, significantly reducing heating time before use and making furnace startup easier.

No drying process is needed, so...

Construction and repair periods can be shortened, increasing furnace operation rates and improving productivity
Fuel consumption is eliminated, reducing CO₂ emissions

Steel

EVERCLEAN™ $Background$

Features

Used in immersion nozzles and similar components, this technology has the characteristic that unwanted substances (inclusions) in molten steel are less likely to adhere to the nozzle and cause clogging.

Prevents nozzle clogging, so...

Molten steel flow stabilizes in the mold, leading to dramatic quality improvement
Reduced frequency of nozzle replacement leads to improved productivity and energy savings

Robots
Steel

REX-ROBO™ $Background$

Features

This product automates heavy physical labor in hot environments by using robots, thereby achieving work safety, security, labor savings, and reform.

Due to automation with robots...

Workers are liberated from heavy labor in harsh environments with high temperatures, dust, etc.
Labor-saving lowers the risk of being unable to secure workers and thus improves business sustainability

Semicon
ductors
Space

NEXCERA™ $Background$

Features

This material has an extremely low thermal expansion coefficient on the same level as low thermal expansion glass, and because it has higher strength, it has the characteristic of being easily scaled up in size.

Due to the low thermal expansion coefficient and strength...

This can be used in semiconductor manufacturing equipment requiring extremely high precision
It can be processed into lightweight structures while maintaining strength, making it applicable for large mirrors in optical telescopes on satellites

Fuel
cells
Steel
Industrial
furnaces

KROTECT™ $Background$

Features

This insulation material has very low thermal conductivity and exhibits excellent thermal insulation performance. It features higher strength than conventional materials.

Insulation performance is high, so...

Temperature inside a furnace does not drop, reducing energy loss
Fuel cell products (ENE-FARM) can be made smaller and lighter, broadening options for installation locations

Electronic
components

PLATECT™ $Background$

Features

These are firing containers for electronic components with high thermal conductivity and long service life, boasting a roughly 40% global market share for multilayer ceramic capacitor (MLCC) firing.

Due to high thermal conductivity & long service life...

These improve energy efficiency in the firing process, helping to reduce CO₂
Replacement work is reduced, for improved productivity and cost reduction in the firing process

*”ENE-FARM” is a registered trademark of Tokyo Gas Co., Ltd., Osaka Gas Co., Ltd., and ENEOS Corporation.